Damascene copper electroplating for chip interconnections
Link ID	4022
Title	Damascene copper electroplating for chip interconnections
Url	http://www.research.ibm.com/journal/rd/425/andricacos.html
Description	Table 1 Milestones of damascene electroplating for copper chip interconnections. ... The foremost requirement for success of the plating process (as well as ...
Category	Copper > electroplating copper process
Date	25-Feb-2008
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